Abstract: Amongst many water purification techniques, TiO2 photocatalysis is recognized as one of the most promising sustainable methods. It is known that for photocatalytical applications anatase is the most suitable TiO2 phase, however heterojunction of anatase/rutile phases could improve the photocatalytical activity of TiO2 even further. Despite the relative simplicity of TiO2 different synthesis methods lead to the highly dispersed crystal phases and photocatalytic activity of the corresponding samples. Accordingly, suggestions and investigations of various innovative methods of TiO2 synthesis are still needed. In this work structural and photocatalytical properties of TiO2 films deposited by the unconventional method of simultaneous co-sputtering from two magnetrons powered by pulsed-Direct Current (pDC) and Radio Frequency (RF) power sources with negative bias voltage have been studied. More specifically, TiO2 film thickness, microstructure, surface roughness, crystal structure, optical transmittance and photocatalytical properties were investigated by profilometer, scanning electron microscope, atomic force microscope, X-ray diffractometer and UV-Vis spectrophotometer respectively. The proposed unconventional two magnetron co-sputtering based TiO2 film formation method showed very promising results for crystalline TiO2 film formation while keeping process temperatures below 100 °C. XRD analysis revealed that by using proper combination of power source type and bias voltage various TiO2 phases (amorphous, anatase, rutile or their mixture) can be synthesized selectively. Moreover, strong dependency between power source type and surface roughness, as well as between the bias voltage and band gap value of TiO2 films was observed. Interestingly, TiO2 films deposited by two magnetron co-sputtering without bias voltage had one of the highest band gap values between the investigated films but its photocatalytic activity was superior compared to all other samples. It is suggested that this is due to the dominating nanocrystalline anatase phase with various exposed surfaces including photocatalytically the most active {001}.
Abstract: In this study, we investigated (In,Ga,Zn)Ox (IGZO) thin films and examined their characteristics of using Ga2O3-2 ZnO (GZO) co-sputtered In2O3 prepared by dual target radio frequency magnetron sputtering at room temperature in a pure Ar atmosphere. RF powers of 80 W and 70 W were used for GZO and pure In2O3, room temperature (RT) was used as deposition temperature, and the deposition time was changed from 15 min to 60 min. Structural, surface, electrical, and optical properties of IGZO thin films were investigated as a function of deposition time. Furthermore, the GZO co-sputtered In2O3 thin films showed a very smooth and featureless surface and an amorphous structure regardless of the deposition time due to the room temperature sputtering process. We would show that the co-sputtered IGZO thin films exhibited transparent electrode properties with high transmittance ratio and low resistivity.
Abstract: The hard clam (meretrix lusoria) cultivated industry
has been developed vigorously for recent years in Taiwan, and
seawater quality determines the cultivated environment. The pH
concentration variation affects survival rate of meretrix lusoria
immediately. In order to monitor seawater quality, solid-state sensing
electrode of ruthenium-doped titanium dioxide (TiO2:Ru) is developed
to measure hydrogen ion concentration in different cultivated
solutions. Because the TiO2:Ru sensing electrode has high chemical
stability and superior sensing characteristics, thus it is applied as a pH
sensor. Response voltages of TiO2:Ru sensing electrode are readout by
instrument amplifier in different sample solutions. Mean sensitivity
and linearity of TiO2:Ru sensing electrode are 55.20 mV/pH and 0.999
from pH1 to pH13, respectively. We expect that the TiO2:Ru sensing
electrode can be applied to real environment measurement, therefore
we collect two sample solutions by different meretrix lusoria
cultivated ponds in the Yunlin, Taiwan. The two sample solutions are
both measured for 200 seconds after calibration of standard pH buffer
solutions (pH7, pH8 and pH 9). Mean response voltages of sample 1
and sample 2 are -178.758 mV (Standard deviation=0.427 mV) and
-180.206 mV (Standard deviation =0.399 mV), respectively. Response
voltages of the two sample solutions are between pH 8 and pH 9 which
conform to weak alkali range and suitable meretrix lusoria growth. For
long-term monitoring, drift of cultivated solutions (sample 1 and
sample 2) are 1.16 mV/hour and 1.03 mV/hour, respectively.