Abstract: A two dimensional numerical simulation has been
performed for incompressible and compressible fluid flow through
microchannels in slip flow regime. The Navier-Stokes equations have
been solved in conjunction with Maxwell slip conditions for
modeling flow field associated with slip flow regime. The wall
roughness is simulated with triangular microelements distributed on
wall surfaces to study the effects of roughness on fluid flow. Various
Mach and Knudsen numbers are used to investigate the effects of
rarefaction as well as compressibility. It is found that rarefaction has
more significant effect on flow field in microchannels with higher
relative roughness. It is also found that compressibility has more
significant effects on Poiseuille number when relative roughness
increases. In addition, similar to incompressible models the increase
in average fRe is more significant at low Knudsen number flows but
the increase of Poiseuille number duo to relative roughness is sharper
for compressible models. The numerical results have also validated
with some available theoretical and experimental relations and good
agreements have been seen.