Development of a Fiber based Interferometric Sensor for Non-contact Displacement Measurement

In this paper, a fiber based Fabry-Perot interferometer is proposed and demonstrated for a non-contact displacement measurement. A piece of micro-prism which attached to the mechanical vibrator is served as the target reflector. Interference signal is generated from the superposition between the sensing beam and the reference beam within the sensing arm of the fiber sensor. This signal is then converted to the displacement value by using a developed program written in visual Cµ programming with a resolution of λ/8. A classical function generator is operated for controlling the vibrator. By fixing an excitation frequency of 100 Hz and varying the excitation amplitude range of 0.1 – 3 Volts, the output displacements measured by the fiber sensor are obtained from 1.55 μm to 30.225 μm. A reference displacement sensor with a sensitivity of ~0.4 μm is also employed for comparing the displacement errors between both sensors. We found that over the entire displacement range, a maximum and average measurement error are obtained of 0.977% and 0.44% respectively.