Simulation of a Multi-Component Transport Model for the Chemical Reaction of a CVD-Process

In this paper we present discretization and decomposition methods for a multi-component transport model of a chemical vapor deposition (CVD) process. CVD processes are used to manufacture deposition layers or bulk materials. In our transport model we simulate the deposition of thin layers. The microscopic model is based on the heavy particles, which are derived by approximately solving a linearized multicomponent Boltzmann equation. For the drift-process of the particles we propose diffusionreaction equations as well as for the effects of heat conduction. We concentrate on solving the diffusion-reaction equation with analytical and numerical methods. For the chemical processes, modelled with reaction equations, we propose decomposition methods and decouple the multi-component models to simpler systems of differential equations. In the numerical experiments we present the computational results of our proposed models.

Effect of Inertia on the Fractal Dimension of Particle Line in three-dimensional Turbulent Flows using Kinematic Simulation

The dispersion of heavy particles line in an isotropic and incompressible three-dimensional turbulent flow has been studied using the Kinematic Simulation techniques to find out the evolution of the line fractal dimension. In this study, the fractal dimension of the line is found for different cases of heavy particles inertia (different Stokes numbers) in the absence of the particle gravity with a comparison with the fractal dimension obtained in the diffusion case of material line at the same Reynolds number. It can be concluded for the dispersion of heavy particles line in turbulent flow that the particle inertia affect the fractal dimension of a line released in a turbulent flow for Stokes numbers 0.02 < St < 2. At the beginning for small times, most of the different cases are not affected by the inertia until a certain time, the particle response time τa, with larger time as the particles inertia increases, the fractal dimension of the line increases owing to the particles becoming more sensitive to the small scales which cause the change in the line shape during its journey.

Effect of Particle Gravity on the Fractal Dimension of Particle Line in three-dimensional Turbulent Flows using Kinematic Simulation

In this study, the dispersion of heavy particles line in an isotropic and incompressible three-dimensional turbulent flow has been studied using the Kinematic Simulation techniques to find out the evolution of the line fractal dimension. The fractal dimension of the line is found in the case of different particle gravity (in practice, different values of particle drift velocity) in the presence of small particle inertia with a comparison with that obtained in the diffusion case of material line at the same Reynolds number. It can be concluded for the dispersion of heavy particles line in turbulent flow that the particle gravity affect the fractal dimension of the line for different particle gravity velocities in the range 0.2 < W < 2. With the increase of the particle drift velocity, the fractal dimension of the line decreases which may be explained as the particles pass many scales in their journey in the direction of the gravity and the particles trajectories do not affect by these scales at high particle drift velocities.