Abstract: Non-water based fixed abrasive polishing was adopted
to manufacture LBO crystal for nano precision surface quality because
of its deliquescent. Ethyl alcohol was selected as the non-water based
slurry solvent and ethanediamine, lactic acid, hydrogen peroxide was
added in the slurry as a chemical additive, respectively. Effect of
different additives with non-water based slurry on material removal
rate, surface topography, microscopic appearances, and surface
roughness were investigated in fixed abrasive polishing of LBO
crystal. The results show the best surface quality of LBO crystal with
surface roughness Sa 8.2 nm and small damages was obtained by
non-water based slurry with lactic acid. Non-water based fixed
abrasive polishing can achieve nano precision surface quality of LBO
crystal with high material removal.