Abstract: To decrease the grating scale thermal expansion error,
a novel method which based on multiple temperature detection is
proposed. Several temperature sensors are installed on the grating
scale and the temperatures of these sensors are recorded. The
temperatures of every point on the grating scale are calculated by
interpolating between adjacent sensors. According to the thermal
expansion principle, the grating scale thermal expansion error model
can be established by doing the integral for the variations of position
and temperature. A novel compensation method is proposed in this
paper. By applying the established error model, the grating scale
thermal expansion error is decreased by 90% compared with no
compensation. The residual positioning error of the grating scale is
less than 15μm/10m and the accuracy of the machine tool is
significant improved.