Abstract: We report in this paper the design and qualification of a cylindrical unbalanced magnetron source. The dedicated magnetic assemblies were simulated using a finite element model. A hall-effect magnetic probe was then used to characterize those assemblies and compared to the theoretical magnetic profiles. These show a good agreement between the expected and actual values. The qualification of the different magnetic assemblies was then performed by measuring the ion flux density reaching the surface of the sample to be coated using a commercial retarding field energy analyzer. The strongest unbalanced configuration shows an increase from 0.016 A.cm-2 to 0.074 A.cm-2 of the ion flux density reaching the sample surface compared to the standard balanced configuration for a pressure 5.10-3 mbar and a plasma source power of 300 W.
Abstract: The current sheath dynamics in plasma focus facilities
is the most important factors. In this paper the current sheath velocity
at three dimensional with Sahand plasma focus facility is
investigated. For this purpose the discharge is produced in argon gas
with deposited energy lying in the range of 20-37kJ. The current
sheath is monitored using two tridimensional magnetic probes. These
probes installed near the surface of the interior electrode (anode) at
125mm from the anode axis (pinch place). The effect of gas pressure
on the current sheath velocity also is investigated.