Scholarly

Wetting Characterization of High Aspect Ratio Nanostructures by Gigahertz Acoustic Reflectometry

Year: 2016 Volume: 10 Issue: 3 506 - 511 Pages

Abstract: Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method.

Thermal Evaluation of Printed Circuit Board Design Options and Voids in Solder Interface by a Simulation Tool

Year: 2016 Volume: 10 Issue: 3 494 - 505 Pages

Abstract: Quad Flat No-Lead (QFN) packages have become very popular for turners, converters and audio amplifiers, among others applications, needing efficient power dissipation in small footprints. Since semiconductor junction temperature (TJ) is a critical parameter in the product quality. And to ensure that die temperature does not exceed the maximum allowable TJ, a thermal analysis conducted in an earlier development phase is essential to avoid repeated re-designs process with huge losses in cost and time. A simulation tool capable to estimate die temperature of components with QFN package was developed. Allow establish a non-empirical way to define an acceptance criterion for amount of voids in solder interface between its exposed pad and Printed Circuit Board (PCB) to be applied during industrialization process, and evaluate the impact of PCB designs parameters. Targeting PCB layout designer as an end user for the application, a user-friendly interface (GUI) was implemented allowing user to introduce design parameters in a convenient and secure way and hiding all the complexity of finite element simulation process. This cost effective tool turns transparent a simulating process and provides useful outputs after acceptable time, which can be adopted by PCB designers, preventing potential risks during the design stage and make product economically efficient by not oversizing it. This article gathers relevant information related to the design and implementation of the developed tool, presenting a parametric study conducted with it. The simulation tool was experimentally validated using a Thermal-Test-Chip (TTC) in a QFN open-cavity, in order to measure junction temperature (TJ) directly on the die under controlled and knowing conditions. Providing a short overview about standard thermal solutions and impacts in exposed pad packages (i.e. QFN), accurately describe the methods and techniques that the system designer should use to achieve optimum thermal performance, and demonstrate the effect of system-level constraints on the thermal performance of the design.

Identification of Promising Infant Clusters to Obtain Improved Block Layout Designs

Year: 2016 Volume: 10 Issue: 3 488 - 493 Pages

Abstract: The layout optimization of building blocks of unequal areas has applications in many disciplines including VLSI floorplanning, macrocell placement, unequal-area facilities layout optimization, and plant or machine layout design. A number of heuristics and some analytical and hybrid techniques have been published to solve this problem. This paper presents an efficient high-quality building-block layout design technique especially suited for solving large-size problems. The higher efficiency and improved quality of optimized solutions are made possible by introducing the concept of Promising Infant Clusters in a constructive placement procedure. The results presented in the paper demonstrate the improved performance of the presented technique for benchmark problems in comparison with published heuristic, analytic, and hybrid techniques.

Effects of Inlet Distorted Flows on the Performance of an Axial Compressor

Year: 2016 Volume: 10 Issue: 3 478 - 487 Pages

Abstract: Compressor fans in modern aircraft engines are of considerate importance, as they provide majority of thrust required by the aircraft. Their challenging environment is frequently subjected to non-uniform inflow conditions. These conditions could be either due to the flight operating requirements such as take-off and landing, wake interference from aircraft fuselage or cross-flow wind conditions. So, in highly maneuverable flights regimes of fighter aircrafts affects the overall performance of an engine. Since the flow in compressor of an aircraft application is highly sensitive because of adverse pressure gradient due to different flow orientations of the aircraft. Therefore, it is prone to unstable operations. This paper presents the study that focuses on axial compressor response to inlet flow orientations for the range of angles as 0 to 15 degrees. For this purpose, NASA Rotor-37 was taken and CFD mesh was developed. The compressor characteristics map was generated for the design conditions of pressure ratio of 2.106 with the rotor operating at rotational velocity of 17188.7 rpm using CFD simulating environment of ANSYS-CFX®. The grid study was done to see the effects of mesh upon computational solution. Then, the mesh giving the best results, (when validated with the available experimental NASA’s results); was used for further distortion analysis. The flow in the inlet nozzle was given angle orientations ranging from 0 to 15 degrees. The CFD results are analyzed and discussed with respect to stall margin and flow separations due to induced distortions.

Stress Analysis of Water Wall Tubes of a Coal-fired Boiler during Soot Blowing Operation

Year: 2016 Volume: 10 Issue: 3 473 - 477 Pages

Abstract: This research aimed to study the influences of a soot blowing operation and geometrical variables to the stress characteristic of water wall tubes located in soot blowing areas which caused the boilers of Mae Moh power plant to lose their generation hour. The research method is divided into 2 parts (a) measuring the strain on water wall tubes by using 3-element rosette strain gages orientation during a full capacity plant operation and in periods of soot blowing operations (b) creating a finite element model in order to calculate stresses on tubes and validating the model by using experimental data in a steady state plant operation. Then, the geometrical variables in the model were changed to study stresses on the tubes. The results revealed that the stress was not affected by the soot blowing process and the finite element model gave the results 1.24% errors from the experiment. The geometrical variables influenced the stress, with the most optimum tubes design in this research reduced the average stress from the present design 31.28%.

Dynamic Process Monitoring of an Ammonia Synthesis Fixed-Bed Reactor

Year: 2016 Volume: 10 Issue: 3 462 - 472 Pages

Abstract: This study involves the modeling and monitoring of an ammonia synthesis fixed-bed reactor using partial least squares (PLS) and its variants. The process exhibits complex dynamic behavior due to the presence of heat recycling and feed quench. One limitation of static PLS model in this situation is that it does not take account of the process dynamics and hence dynamic PLS was used. Although it showed, superior performance to static PLS in terms of prediction, the monitoring scheme was inappropriate hence adaptive PLS was considered. A limitation of adaptive PLS is that non-conforming observations also contribute to the model, therefore, a new adaptive approach was developed, robust adaptive dynamic PLS. This approach updates a dynamic PLS model and is robust to non-representative data. The developed methodology showed a clear improvement over existing approaches in terms of the modeling of the reactor and the detection of faults.

International Journal of Mechanical, Industrial and Aerospace Sciences

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