Formation of Round Channel for Microfluidic Applications
PDMS (Polydimethylsiloxane) polymer is a suitable material for biological and MEMS (Microelectromechanical systems) designers, because of its biocompatibility, transparency and high resistance under plasma treatment. PDMS round channel is always been of great interest due to its ability to confine the liquid with membrane type micro valves. In this paper we are presenting a very simple way to form round shapemicrofluidic channel, which is based on reflow of positive photoresist AZ® 40 XT. With this method, it is possible to obtain channel of different height simply by varying the spin coating parameters of photoresist.
[1] G. De Cesare, M. Gavesi, F. Palma, B. Riccò. A novel a-Si: H mechanical stress sensor. Thin solid films (2003) 427(1), 191-195.
[2] D. Caputo, G. de Cesare, A. Nascetti, M. Tucci; "Detailed study of amorphous silicon ultra-violet sensor with chromium silicide window layer”, IEEE Trans of Electron Device; (2008). vol. 55 n. 1, 452-456,
[3] T. Kamei, N.M. Toriello, E.T. Lagally, R.G. Blazej, J.R. Scherer, R.A. Street, and R.A. Mathies. "Microfluidic Genetic Analysis with an Integrated a-Si:H Detector”, Journal ofBiomedical Microdevices 7(2), (2005), 147-152
[4] ] H. Schaefer, K. Seibel, M. Walder, L. Schoeler, T. Pletzer,M. Waidelich,H. Ihmels, D. Ehrhardt,M. Boehm, "Monolithic integrated optical detection for microfluidic systems using thin film photodiodes based on amorphous silicon”, Proc. 18th IEEE Int. Conf. MEMS Miami, FL, 2005, p. 758
[5] Costantini F., Nascetti A., Scipinotti R., Domenici F., Sennato S., Gazza L., Bordi F., Pogna N., Manetti C., Caputo D., de Cesare G; "On-chip detection of multiple serum antibodies against epitopes of celiac disease by an array of amorphous silicon sensors", RSC Advances, (2014) Vol. 4, n. 4, pp. 2073-2080
[6] D. Caputo, G. de Cesare, A. Nascetti, R. Negri; "Spectral tuned amorphous silicon p-i-n for DNA detection”, Journal ofNon Crystalline Solids; (2006) vol 352, p.2004
[7] ZhiQiangNiu,Wen Yuan Chen, Shi Yi Shao, Xiao Yu Jia and Wei Ping Zhang "DNA amplification on a PDMS–glass hybrid microchip”, J. Micromech. Microeng.(2006)16:425–433.
[8] D. Caputo, G. De Cesare, A. De Pastina, A. Nascetti, P. Romano, "Thermally actuated microfluidic system for polymerase chain reactionApplications”, Sensors and Microsystems, Lecture Notes in Electrical Engineering (2014) 268: 23-27, October 25, 2013.
[9] Satsanarukkit, P.; van Zyl, J.J.; Hoffmann, M.R., "Novel Parylene fabrication technologies for microfluidic systems with reduced mass, volume, and power consumption," Solid-State Sensors, Actuators and Microsystems (Transducers &EurosensorsXXVII), 2013 Transducers &Eurosensors XXVII, pp.155-158, 16-20 June 2013.
[10] Ryan J. Lemmens, Dennis DeshengMeng”A comparative study on bubble-driven micropumping in microchannels with square and circularcross sections”, Sensors and Actuators A 169 (2011) 164– 170.
[11] Futai N, Gu W, Takayama S"Rapid prototyping of microstructures with bell-shaped cross-sections and its application to deformation-based microfluidic valves”, AdvFunct Mater (2004) 16:1320–1323.
[12] Abbas A, Supiot P, Mille V, Guillochon D, Bocquet B "Capillary microchannel fabrication using plasma polymerized TMDS for fluidic MEMS technology”,J MicromechMicroeng (2009) 19:045022.
[13] Song SH, Lee CK, Kim TJ, Shin IC, Jun SC, Jung HI " A rapid and simple fabrication method for 3-dimensional circular microfluidic channel using metal wire removal process” , MicrofluidNanofluid (2010) 9:533–540
[14] Lee K, Kim C, Shin KS, Lee J, Ju BK, Kim TS, Lee SK, Kang JY "Fabrication of round channels using the surface tension of PDMS and its application to a 3D serpentine mixer”, J MicromechMicroeng (2007) 17:1533–1541
[15] Abdelgawad M, Wu C, Chien WY, Geddie WR, Jewett MAS, Sun Y "A fast and simple method to fabricate circular microchannels in polydimethylsiloxane (PDMS)”, Lab Chip(2010) 11:545–551.
[16] Magalie De Ville, Philippe Coquet, Philippe Brunet and RabahBoukherrou "Simple and low-cost fabrication of PDMS microfluidic round channels by surface-wetting parameters optimization”, Microfluidic Nanofluidic (2011) pp. 1-9.
[17] H.-H. Liu, W.-T. Chen, F.-T. Wu, Characterization of Negative tone photoresistbased on acid catalyzed dehydration cross linking of novolak havingpendant carboxyl group, J. Polym. Res. 9 (2002) 251–256.
[18] http://www.microchemicals.com/technical_information/reflow_photoresist.pdf.
[19] P. H Holloway and C.C Nelson. In situ formation of diffusion barriers in thin filmmetallization system. Thin Solid Films, 35(1): L 13-6, 1976.
[20] Milton Ohring.The Materials Science of Thin Films, volume 1. Academic Press Limited, San Diego, United Kingdom edition1992.
[1] G. De Cesare, M. Gavesi, F. Palma, B. Riccò. A novel a-Si: H mechanical stress sensor. Thin solid films (2003) 427(1), 191-195.
[2] D. Caputo, G. de Cesare, A. Nascetti, M. Tucci; "Detailed study of amorphous silicon ultra-violet sensor with chromium silicide window layer”, IEEE Trans of Electron Device; (2008). vol. 55 n. 1, 452-456,
[3] T. Kamei, N.M. Toriello, E.T. Lagally, R.G. Blazej, J.R. Scherer, R.A. Street, and R.A. Mathies. "Microfluidic Genetic Analysis with an Integrated a-Si:H Detector”, Journal ofBiomedical Microdevices 7(2), (2005), 147-152
[4] ] H. Schaefer, K. Seibel, M. Walder, L. Schoeler, T. Pletzer,M. Waidelich,H. Ihmels, D. Ehrhardt,M. Boehm, "Monolithic integrated optical detection for microfluidic systems using thin film photodiodes based on amorphous silicon”, Proc. 18th IEEE Int. Conf. MEMS Miami, FL, 2005, p. 758
[5] Costantini F., Nascetti A., Scipinotti R., Domenici F., Sennato S., Gazza L., Bordi F., Pogna N., Manetti C., Caputo D., de Cesare G; "On-chip detection of multiple serum antibodies against epitopes of celiac disease by an array of amorphous silicon sensors", RSC Advances, (2014) Vol. 4, n. 4, pp. 2073-2080
[6] D. Caputo, G. de Cesare, A. Nascetti, R. Negri; "Spectral tuned amorphous silicon p-i-n for DNA detection”, Journal ofNon Crystalline Solids; (2006) vol 352, p.2004
[7] ZhiQiangNiu,Wen Yuan Chen, Shi Yi Shao, Xiao Yu Jia and Wei Ping Zhang "DNA amplification on a PDMS–glass hybrid microchip”, J. Micromech. Microeng.(2006)16:425–433.
[8] D. Caputo, G. De Cesare, A. De Pastina, A. Nascetti, P. Romano, "Thermally actuated microfluidic system for polymerase chain reactionApplications”, Sensors and Microsystems, Lecture Notes in Electrical Engineering (2014) 268: 23-27, October 25, 2013.
[9] Satsanarukkit, P.; van Zyl, J.J.; Hoffmann, M.R., "Novel Parylene fabrication technologies for microfluidic systems with reduced mass, volume, and power consumption," Solid-State Sensors, Actuators and Microsystems (Transducers &EurosensorsXXVII), 2013 Transducers &Eurosensors XXVII, pp.155-158, 16-20 June 2013.
[10] Ryan J. Lemmens, Dennis DeshengMeng”A comparative study on bubble-driven micropumping in microchannels with square and circularcross sections”, Sensors and Actuators A 169 (2011) 164– 170.
[11] Futai N, Gu W, Takayama S"Rapid prototyping of microstructures with bell-shaped cross-sections and its application to deformation-based microfluidic valves”, AdvFunct Mater (2004) 16:1320–1323.
[12] Abbas A, Supiot P, Mille V, Guillochon D, Bocquet B "Capillary microchannel fabrication using plasma polymerized TMDS for fluidic MEMS technology”,J MicromechMicroeng (2009) 19:045022.
[13] Song SH, Lee CK, Kim TJ, Shin IC, Jun SC, Jung HI " A rapid and simple fabrication method for 3-dimensional circular microfluidic channel using metal wire removal process” , MicrofluidNanofluid (2010) 9:533–540
[14] Lee K, Kim C, Shin KS, Lee J, Ju BK, Kim TS, Lee SK, Kang JY "Fabrication of round channels using the surface tension of PDMS and its application to a 3D serpentine mixer”, J MicromechMicroeng (2007) 17:1533–1541
[15] Abdelgawad M, Wu C, Chien WY, Geddie WR, Jewett MAS, Sun Y "A fast and simple method to fabricate circular microchannels in polydimethylsiloxane (PDMS)”, Lab Chip(2010) 11:545–551.
[16] Magalie De Ville, Philippe Coquet, Philippe Brunet and RabahBoukherrou "Simple and low-cost fabrication of PDMS microfluidic round channels by surface-wetting parameters optimization”, Microfluidic Nanofluidic (2011) pp. 1-9.
[17] H.-H. Liu, W.-T. Chen, F.-T. Wu, Characterization of Negative tone photoresistbased on acid catalyzed dehydration cross linking of novolak havingpendant carboxyl group, J. Polym. Res. 9 (2002) 251–256.
[18] http://www.microchemicals.com/technical_information/reflow_photoresist.pdf.
[19] P. H Holloway and C.C Nelson. In situ formation of diffusion barriers in thin filmmetallization system. Thin Solid Films, 35(1): L 13-6, 1976.
[20] Milton Ohring.The Materials Science of Thin Films, volume 1. Academic Press Limited, San Diego, United Kingdom edition1992.
@article{"International Journal of Electrical, Electronic and Communication Sciences:49894", author = "A. Zahra and G. de Cesare and D. Caputo and A. Nascetti", title = "Formation of Round Channel for Microfluidic Applications", abstract = "PDMS (Polydimethylsiloxane) polymer is a suitable material for biological and MEMS (Microelectromechanical systems) designers, because of its biocompatibility, transparency and high resistance under plasma treatment. PDMS round channel is always been of great interest due to its ability to confine the liquid with membrane type micro valves. In this paper we are presenting a very simple way to form round shapemicrofluidic channel, which is based on reflow of positive photoresist AZ® 40 XT. With this method, it is possible to obtain channel of different height simply by varying the spin coating parameters of photoresist.
", keywords = "Lab-on-Chip, PDMS, Reflow, Round microfluidic channel.", volume = "8", number = "7", pages = "1039-5", }
