Design and Fabrication of an Array Microejector Driven by a Shear-Mode Piezoelectric Actuator
This paper reports a novel actuating design that uses
the shear deformation of a piezoelectric actuator to deflect a
bulge-diaphragm for driving an array microdroplet ejector. In essence,
we employed a circular-shaped actuator poled radial direction with
remnant polarization normal to the actuating electric field for inducing
the piezoelectric shear effect. The array microdroplet ejector consists
of a shear type piezoelectric actuator, a vibration plate, two chamber
plates, two channel plates and a nozzle plate. The vibration, chamber
and nozzle plate components are fabricated using nickel
electroforming technology, whereas the channel plate is fabricated by
etching of stainless steel. The diaphragm displacement was measured
by the laser two-dimensional scanning vibrometer. The ejected
droplets of the microejector were also observed via an optic
visualization system.
[1] Y. Fuda, T. Yoshida, Piezoelectric torsional actuator, Ferroelectrics 160
(1994) 323–330.
[2] J. Satonobu, N. Torii, K. Nakamura, S. Ueha, Construction of megatorque
hybrid transducer type ultrasonic motor, Jpn. J. Appl. Phys. 35 (1996)
5038–5041.
[3] E.L. Kyser, S.B. Sears, Method and apparatus for recording with writing
fluids and drop projection means therefore, US Patent 3,946,398 (1976).
[4] T. Kitahara, Ink-jet head with multi-layer piezoelectric actuator, in:
Proceedings of the IS&T’s 11th International Congress on Adv. in
Non-Impact Printing Technologies, Hilton Head, SC, USA, October
29–November 3, 1995, pp. 346–349.
[5] S.I. Zoltan, Pulse droplet ejection system, US Patent 3,683,212 (1974).
[6] A.J. Michaelis, A.D. Paton, S. Temple, W.S. Bartky, Droplet deposition
apparatus, US Patent 4,887,100 (1989).
[7] K.H. Fischbeck, P.A. Hoisington, Shear mode transducer for ink jet
systems, US Patent 4,825,227 (1989).
[8] J. Brunahl, A.M. Grishin, Piezoelectric shear mode drop-on-demand
inkjet actuator, Sens. Actuators A 101 (2002) 371–382.
[9] http://www.dimatix.com/technology/spectra-piezoelectric.asp.
[10] D.A. Berlincourt, C. Fall, F.T. Brunarski, Polarization of titanate
ceramics, US Patent 2,928,163 (1960).
[11] J.A. Sugden, Ferroelectric ceramic materials, US Patent 3,068,177
(1962).
[12] M. Sayer, B. Judd, K.E. Assal, E. Prassad, Poling of piezoelectric, J. Can.
Ceram. Soc. 50 (1981) 23–28.
[13] P. Bryant, Optimization of poling conditions for piezoelectric ceramics,
Mater. Sci. Forum 34 (1988) 285–289.
[14] H.T. Chung, H.G. Kim, Characteristics of domain in tetragonal phase
PZT ceramics, Ferroelectrics 76 (1987) 327–333.
[1] Y. Fuda, T. Yoshida, Piezoelectric torsional actuator, Ferroelectrics 160
(1994) 323–330.
[2] J. Satonobu, N. Torii, K. Nakamura, S. Ueha, Construction of megatorque
hybrid transducer type ultrasonic motor, Jpn. J. Appl. Phys. 35 (1996)
5038–5041.
[3] E.L. Kyser, S.B. Sears, Method and apparatus for recording with writing
fluids and drop projection means therefore, US Patent 3,946,398 (1976).
[4] T. Kitahara, Ink-jet head with multi-layer piezoelectric actuator, in:
Proceedings of the IS&T’s 11th International Congress on Adv. in
Non-Impact Printing Technologies, Hilton Head, SC, USA, October
29–November 3, 1995, pp. 346–349.
[5] S.I. Zoltan, Pulse droplet ejection system, US Patent 3,683,212 (1974).
[6] A.J. Michaelis, A.D. Paton, S. Temple, W.S. Bartky, Droplet deposition
apparatus, US Patent 4,887,100 (1989).
[7] K.H. Fischbeck, P.A. Hoisington, Shear mode transducer for ink jet
systems, US Patent 4,825,227 (1989).
[8] J. Brunahl, A.M. Grishin, Piezoelectric shear mode drop-on-demand
inkjet actuator, Sens. Actuators A 101 (2002) 371–382.
[9] http://www.dimatix.com/technology/spectra-piezoelectric.asp.
[10] D.A. Berlincourt, C. Fall, F.T. Brunarski, Polarization of titanate
ceramics, US Patent 2,928,163 (1960).
[11] J.A. Sugden, Ferroelectric ceramic materials, US Patent 3,068,177
(1962).
[12] M. Sayer, B. Judd, K.E. Assal, E. Prassad, Poling of piezoelectric, J. Can.
Ceram. Soc. 50 (1981) 23–28.
[13] P. Bryant, Optimization of poling conditions for piezoelectric ceramics,
Mater. Sci. Forum 34 (1988) 285–289.
[14] H.T. Chung, H.G. Kim, Characteristics of domain in tetragonal phase
PZT ceramics, Ferroelectrics 76 (1987) 327–333.
@article{"International Journal of Mechanical, Industrial and Aerospace Sciences:70033", author = "Chiang-Ho Cheng and Hong-Yih Cheng and An-Shik Yang and Tung-Hsun Hsu", title = "Design and Fabrication of an Array Microejector Driven by a Shear-Mode Piezoelectric Actuator", abstract = "This paper reports a novel actuating design that uses
the shear deformation of a piezoelectric actuator to deflect a
bulge-diaphragm for driving an array microdroplet ejector. In essence,
we employed a circular-shaped actuator poled radial direction with
remnant polarization normal to the actuating electric field for inducing
the piezoelectric shear effect. The array microdroplet ejector consists
of a shear type piezoelectric actuator, a vibration plate, two chamber
plates, two channel plates and a nozzle plate. The vibration, chamber
and nozzle plate components are fabricated using nickel
electroforming technology, whereas the channel plate is fabricated by
etching of stainless steel. The diaphragm displacement was measured
by the laser two-dimensional scanning vibrometer. The ejected
droplets of the microejector were also observed via an optic
visualization system.", keywords = "Actuator, nozzle, microejector, piezoelectric.", volume = "9", number = "7", pages = "1191-6", }