Influence of Different Thicknesses on Mechanical and Corrosion Properties of α-C:H Films
The hydrogenated amorphous carbon films (α-C:H)
were deposited on p-type Si (100) substrates at different thicknesses by
radio frequency plasma enhanced chemical vapor deposition
technique (rf-PECVD). Raman spectra display asymmetric
diamond-like carbon (DLC) peaks, representative of the α-C:H films.
The decrease of intensity ID/IG ratios revealed the sp3 content arise at
different thicknesses of the α-C:H films. In terms of mechanical
properties, the high hardness and elastic modulus values showed the
elastic and plastic deformation behaviors related to sp3 content in
amorphous carbon films. Electrochemical properties showed that the
α-C:H films exhibited excellent corrosion resistance in air-saturated
3.5 wt.% NaCl solution for pH 2 at room temperature. Thickness
increasing affected the small sp2 clusters in matrix, restricting the
velocity transfer and exchange of electrons. The deposited α-C:H films
exhibited excellent mechanical properties and corrosion resistance.
[1] S. Kassavetis, A. Laskarakis, S. Logothetidis, “Effect of ion
bombardment and hydrogen pressure during deposition on the optical
properties of hydrogenated amorphous carbon thin films,” Diamond
Relat. Mater., vol. 20, pp. 109-114, November 2010.
[2] H. Tsai, D.B. Bogy, “Characterization of diamond like carbon films and
their application as overcoats on thin-film media for magenetic
recording,” J. Vac. Sci. Tech., vol. A 5, no.6, pp. 3287, July 1987.
[3] P. Tsai, K. Chen, “Evaluation of microstructures and mechanical
properties of diamond like carbon films deposited by filtered cathodic arc
plasma,” Thin Solid Films, vol. 516, pp. 5440-5444, July 2008.
[4] T. Itoh, N. Mutsukura, “Mechanical properties of a-C:H thin films
deposited by r.f. PECVD method,” Vacuum, vol. 77, pp. 11-18, July 2004.
[5] J. Robertson, “Diamond-like a morphous carbon,” Mater. Sci. Eng., vol.
R37, pp .129-281, May 2002.
[6] H.X. Li, T. Xu, J.M. Chen, H.D. Zhou, H.W. Liu, “The effect of applied
dc bias voltage on the properties of a-C:H films prepared in a dual dc-rf
plasma system,” Appl. Surf. Sci., vol. 227, pp. 364-372, December 2004.
[7] B.C. Na, A. Tanaka, “Tribological characteristics of diamond-like films
based on hardness of mating materials,” Thin Solid Films, vol. 478, pp.
176-182, December 2005.
[8] Z. Wang, C. Wang, Q. Wang, J. Zhang, “Electrochemical corrosion
behaviors of a-C:H and a-C:Nx:H films,” Appl. Surf. Sci., vol. 254, pp.
3021-3025, October 2008.
[9] T.M. Manhabosco, A.P.M. Barboza, R.J.C Batista, B.R.A. Neves, I.L.
Müller, “Corrosion, wear and wear-corrosion behavior of graphite-like
a-C:H films deposited on bare and nitrided titanium alloy,” Diamond
Relat. Mater., vol. 31, pp. 58-64, November 2012.
[10] W.G. Cui, Q.B. Lai, L. Zhang, F.M. Wang, “Quantitative measurements
of sp3 content in DLC films with Raman spectroscopy,” Surf. Coatings.
Technol., vol. 205, pp. 1995-1999, August 2010.
[11] W.C. Oliver, G.M. Pharr, “Measurement of hardness and elastic modulus
by instrumented indentation,” J. Mater. Res., vol. 19 (1), pp.3, January
2004.
[12] ASTM G4-99, Standard practice for exposure of metals and alloys by
alternate immersion in neutral 3.5 % sodium chloride solution, 2005.
[13] ASTM G102-89, Standard practice for calculation of corrosion rate and
related information from electrochemical measurements, 2005.
[14] Y.J. Yu, J.G. Kim, S.H. Cho, J.H. Boo, “Plasma-polymerized toluene
films for corrosion inhibition in microelectronic devices,” Surf. Coat.
Technol., vol. 162, pp. 161-166, August 2002.
[15] L.G. Parratt, “Surface studies of solids by total reflection of X-Rays,”
Phys. Rev., vol. 95, pp. 359-369, July 1954.
[16] H. Saitoh, “Classification of diamond-like carbon films,” Jpn. J. Appl.
Phys., vol. 51, pp. 090120, August 2012.
[17] C. Casiraghi, F. Piazza, A.C. Ferrari, D. Grambole, J. Robertson,
“Bonding in hydrogenated diamond-like carbon by Raman
spectroscopy,” Diamond Relat. Mater., vol. 14, pp. 1098-1102, December
2004.
[18] M.A. Tamor, W.C. Vassel. “Raman “fingerprinting” of amorphous
carbon films”, J. Appl. Phys., vol. 76, pp. 3823-3830, June 1994.
[19] F. Liu, Z. Wang, “Thickness dependence of the structure of diamond-like
carbon films by Raman specroscopy,” Surf. Coatings. Technol., vol. 203,
pp. 1829-1832, January 2009.
[20] A.R. Marcondes, M. Uedo, K.G. Kostov, A.F. Belto, N.F. Leite, G.F.
Gomes, C.M. Lepienski, “Improvements of ultra-high molecular weight
polyethylene mechanical properties by nitrogen plasma immersion ion
implantation,” Brazilain Journal of Physics, vol. 34, no.4B,
pp.1667-1672, December 2004.
[21] A.C. Ferrari, J. Robertson, “Resonant Raman spectroscopy of disordered,
amorphous, and diamondlike carbon,” Phys. Rev. B,” vol. 64, pp. 075414,
July 2001.
[22] A.C. Ferrari, J. Robertson, “Interpretation of Raman spectra of disordered
and amorphous carbon,” Phys. Rev. B, vol. 61, pp.14095-14107, May
2000.
[23] E. Tomasella, L. Thomas, M. Dubois, C. Meunier, “Structural and
mechanical properties of a-C:H thin films grown by RF-PECVD,”
Diamond Relat. Mater., vol. 13, pp. 1618-1624, March 2004.
[24] A. Bruinink, A. Schroeder, G. Francz, R. Hauert, “In vitro studies on the
effect of delaminated a-C:H film fragments on bone marrow cell
cultures,” Biomaterials, vol. 26, pp. 3487-3494, September 2005.
[25] P. Schmutz, Laboratory for Joining Technologies and Corrosion, EMPA
DÜbendorf, 2013.
[26] P. Wongpanya, S. Tunmee, C. Euaruksakul, P. Songsiriritthigul, N.
Witit-anun, “Corrosion behaviors and mechanical properties of CrN
film,” Adv. Mat. Res., vol. 853, pp. 155-163, December 2014.
[1] S. Kassavetis, A. Laskarakis, S. Logothetidis, “Effect of ion
bombardment and hydrogen pressure during deposition on the optical
properties of hydrogenated amorphous carbon thin films,” Diamond
Relat. Mater., vol. 20, pp. 109-114, November 2010.
[2] H. Tsai, D.B. Bogy, “Characterization of diamond like carbon films and
their application as overcoats on thin-film media for magenetic
recording,” J. Vac. Sci. Tech., vol. A 5, no.6, pp. 3287, July 1987.
[3] P. Tsai, K. Chen, “Evaluation of microstructures and mechanical
properties of diamond like carbon films deposited by filtered cathodic arc
plasma,” Thin Solid Films, vol. 516, pp. 5440-5444, July 2008.
[4] T. Itoh, N. Mutsukura, “Mechanical properties of a-C:H thin films
deposited by r.f. PECVD method,” Vacuum, vol. 77, pp. 11-18, July 2004.
[5] J. Robertson, “Diamond-like a morphous carbon,” Mater. Sci. Eng., vol.
R37, pp .129-281, May 2002.
[6] H.X. Li, T. Xu, J.M. Chen, H.D. Zhou, H.W. Liu, “The effect of applied
dc bias voltage on the properties of a-C:H films prepared in a dual dc-rf
plasma system,” Appl. Surf. Sci., vol. 227, pp. 364-372, December 2004.
[7] B.C. Na, A. Tanaka, “Tribological characteristics of diamond-like films
based on hardness of mating materials,” Thin Solid Films, vol. 478, pp.
176-182, December 2005.
[8] Z. Wang, C. Wang, Q. Wang, J. Zhang, “Electrochemical corrosion
behaviors of a-C:H and a-C:Nx:H films,” Appl. Surf. Sci., vol. 254, pp.
3021-3025, October 2008.
[9] T.M. Manhabosco, A.P.M. Barboza, R.J.C Batista, B.R.A. Neves, I.L.
Müller, “Corrosion, wear and wear-corrosion behavior of graphite-like
a-C:H films deposited on bare and nitrided titanium alloy,” Diamond
Relat. Mater., vol. 31, pp. 58-64, November 2012.
[10] W.G. Cui, Q.B. Lai, L. Zhang, F.M. Wang, “Quantitative measurements
of sp3 content in DLC films with Raman spectroscopy,” Surf. Coatings.
Technol., vol. 205, pp. 1995-1999, August 2010.
[11] W.C. Oliver, G.M. Pharr, “Measurement of hardness and elastic modulus
by instrumented indentation,” J. Mater. Res., vol. 19 (1), pp.3, January
2004.
[12] ASTM G4-99, Standard practice for exposure of metals and alloys by
alternate immersion in neutral 3.5 % sodium chloride solution, 2005.
[13] ASTM G102-89, Standard practice for calculation of corrosion rate and
related information from electrochemical measurements, 2005.
[14] Y.J. Yu, J.G. Kim, S.H. Cho, J.H. Boo, “Plasma-polymerized toluene
films for corrosion inhibition in microelectronic devices,” Surf. Coat.
Technol., vol. 162, pp. 161-166, August 2002.
[15] L.G. Parratt, “Surface studies of solids by total reflection of X-Rays,”
Phys. Rev., vol. 95, pp. 359-369, July 1954.
[16] H. Saitoh, “Classification of diamond-like carbon films,” Jpn. J. Appl.
Phys., vol. 51, pp. 090120, August 2012.
[17] C. Casiraghi, F. Piazza, A.C. Ferrari, D. Grambole, J. Robertson,
“Bonding in hydrogenated diamond-like carbon by Raman
spectroscopy,” Diamond Relat. Mater., vol. 14, pp. 1098-1102, December
2004.
[18] M.A. Tamor, W.C. Vassel. “Raman “fingerprinting” of amorphous
carbon films”, J. Appl. Phys., vol. 76, pp. 3823-3830, June 1994.
[19] F. Liu, Z. Wang, “Thickness dependence of the structure of diamond-like
carbon films by Raman specroscopy,” Surf. Coatings. Technol., vol. 203,
pp. 1829-1832, January 2009.
[20] A.R. Marcondes, M. Uedo, K.G. Kostov, A.F. Belto, N.F. Leite, G.F.
Gomes, C.M. Lepienski, “Improvements of ultra-high molecular weight
polyethylene mechanical properties by nitrogen plasma immersion ion
implantation,” Brazilain Journal of Physics, vol. 34, no.4B,
pp.1667-1672, December 2004.
[21] A.C. Ferrari, J. Robertson, “Resonant Raman spectroscopy of disordered,
amorphous, and diamondlike carbon,” Phys. Rev. B,” vol. 64, pp. 075414,
July 2001.
[22] A.C. Ferrari, J. Robertson, “Interpretation of Raman spectra of disordered
and amorphous carbon,” Phys. Rev. B, vol. 61, pp.14095-14107, May
2000.
[23] E. Tomasella, L. Thomas, M. Dubois, C. Meunier, “Structural and
mechanical properties of a-C:H thin films grown by RF-PECVD,”
Diamond Relat. Mater., vol. 13, pp. 1618-1624, March 2004.
[24] A. Bruinink, A. Schroeder, G. Francz, R. Hauert, “In vitro studies on the
effect of delaminated a-C:H film fragments on bone marrow cell
cultures,” Biomaterials, vol. 26, pp. 3487-3494, September 2005.
[25] P. Schmutz, Laboratory for Joining Technologies and Corrosion, EMPA
DÜbendorf, 2013.
[26] P. Wongpanya, S. Tunmee, C. Euaruksakul, P. Songsiriritthigul, N.
Witit-anun, “Corrosion behaviors and mechanical properties of CrN
film,” Adv. Mat. Res., vol. 853, pp. 155-163, December 2014.
@article{"International Journal of Chemical, Materials and Biomolecular Sciences:68565", author = "S. Tunmee and P. Wongpanya and I. Toda and X. L. Zhou and Y. Nakaya and N. Konkhunthot and S. Arakawa and H. Saitoh", title = "Influence of Different Thicknesses on Mechanical and Corrosion Properties of α-C:H Films", abstract = "The hydrogenated amorphous carbon films (α-C:H)
were deposited on p-type Si (100) substrates at different thicknesses by
radio frequency plasma enhanced chemical vapor deposition
technique (rf-PECVD). Raman spectra display asymmetric
diamond-like carbon (DLC) peaks, representative of the α-C:H films.
The decrease of intensity ID/IG ratios revealed the sp3 content arise at
different thicknesses of the α-C:H films. In terms of mechanical
properties, the high hardness and elastic modulus values showed the
elastic and plastic deformation behaviors related to sp3 content in
amorphous carbon films. Electrochemical properties showed that the
α-C:H films exhibited excellent corrosion resistance in air-saturated
3.5 wt.% NaCl solution for pH 2 at room temperature. Thickness
increasing affected the small sp2 clusters in matrix, restricting the
velocity transfer and exchange of electrons. The deposited α-C:H films
exhibited excellent mechanical properties and corrosion resistance.
", keywords = "Thickness, Mechanical properties, Electrochemical
corrosion properties, α-C:H film.", volume = "8", number = "12", pages = "1407-6", }
