Fabricating Protruded Micro-features on AA6061 Substrates by Hot Embossing Method
Metallic micro parts are playing an important role in micro-fabrication industry. Recently, we have demonstrated a new deformation mechanism for micro-formability of polycrystalline materials. Different depressed micro-features smaller than the grain size have been successfully fabricated on 6061 aluminum alloy (AA6061) substrates with good fidelity. To further verify this proposed deformation mechanism that grain size is not a limiting factor, we demonstrate here that in addition of depressed features, protruded micro-features on a polycrystalline substrate can similarly be fabricated.
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Mg-9Al-1Zn alloy with ultrafine-grained microstructure," Scripta
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[3] S. G. Kang, Y. S. Na, K. Y. Park, J.E. Jeon, S. C. Son, J. H. Lee, "A
study on the micro-formability of Al 5083 superplastic alloy using
micro-forging method," Materials Science and Engineering A, vol. 448-
451, pp. 338-342, 2007.
[4] X. G. Qiao, N. Gao, Z. Moktadir, M. Kraft, M. J. Starink, "Fabrication
of MEMS components using ultrafine-grained aluminium alloys,"
Journal of Micromechanics and Microengineering, vol. 20, no. 4, 2010.
[5] Y. Qin, "Micro-forming and miniature manufacturing systems -
development needs and perspectives," Journal of Materials Processing
Technology, vol. 177, no. 1-3, pp. 8-18, 2006.
[6] Y. Saotome, and A. Inoue, "Superplastic micro-forming of
microstructures," Proceedings of the IEEE Micro Electro Mechanical
Systems, pp. 343-348, 25 January 1994 through 28 January 1994, 1994.
[7] Y. Saotome, T. Zhang, and A. Inoue, "Microforming of MEMS parts
with amorphous alloys," Proceedings of the 1998 MRS Fall Meeting -
Symposium MM on'Bulk Metallic Glasses'. pp. 385-390.
[8] F. Vollertsen, Z. Hu, H. S. Niehoff, C. Theiler, "State of the art in micro
forming and investigations into micro deep drawing," Journal of
Materials Processing Technology, vol. 151, no. 1-3 SPEC. ISS., pp. 70-
79, 2004
[9] R. Z. Valiev, R. K. Islamgaliev, and I. V. Alexandrov, "Bulk
nanostructured materials from severe plastic deformation," Progress in
Materials Science, vol. 45, no. 2, pp. 103-189, 2000.
[10] Y. C. Lam, N. K. Tran, C. Y. Yue, M. J. Tan, "New deformation
phenomenon for micro-formability of polycrystalline materials,"
Materials Science and Engineering: A, vol. 528, no. 3, pp. 1906-1909,
2011.
[11] N. K. Tran, Y. C. Lam, C. Y. Yue, M. J. Tan, "Manufacturing of an
aluminum alloy mold for micro-hot embossing of polymeric microdevices,"
Journal of Micromechanics and Microengineering, vol. 20, no.
5, pp. 055020, 2010.
[12] N. K. Tran, Y. C. Lam, C. Y. Yue, M. J. Tan, "Evaluation of roughness,
hardness, and strength of AA 6061 molds for manufacturing polymeric
microdevices," International Journal of Advanced Manufacturing
Technology, pp. 1-7, 2011.
[1] M. Geiger, M. Kleiner, R. Eckstein, N. Tiesler, U. Engel,
"Microforming," CIRP Annals - Manufacturing Technology, vol. 50, no.
2, pp. 445-462, 2001.
[2] W. J. Kim, S. J. Yoo, and H. K. Kim, "Superplastic microforming of
Mg-9Al-1Zn alloy with ultrafine-grained microstructure," Scripta
Materialia, vol. 59, no. 6, pp. 599-602, 2008.
[3] S. G. Kang, Y. S. Na, K. Y. Park, J.E. Jeon, S. C. Son, J. H. Lee, "A
study on the micro-formability of Al 5083 superplastic alloy using
micro-forging method," Materials Science and Engineering A, vol. 448-
451, pp. 338-342, 2007.
[4] X. G. Qiao, N. Gao, Z. Moktadir, M. Kraft, M. J. Starink, "Fabrication
of MEMS components using ultrafine-grained aluminium alloys,"
Journal of Micromechanics and Microengineering, vol. 20, no. 4, 2010.
[5] Y. Qin, "Micro-forming and miniature manufacturing systems -
development needs and perspectives," Journal of Materials Processing
Technology, vol. 177, no. 1-3, pp. 8-18, 2006.
[6] Y. Saotome, and A. Inoue, "Superplastic micro-forming of
microstructures," Proceedings of the IEEE Micro Electro Mechanical
Systems, pp. 343-348, 25 January 1994 through 28 January 1994, 1994.
[7] Y. Saotome, T. Zhang, and A. Inoue, "Microforming of MEMS parts
with amorphous alloys," Proceedings of the 1998 MRS Fall Meeting -
Symposium MM on'Bulk Metallic Glasses'. pp. 385-390.
[8] F. Vollertsen, Z. Hu, H. S. Niehoff, C. Theiler, "State of the art in micro
forming and investigations into micro deep drawing," Journal of
Materials Processing Technology, vol. 151, no. 1-3 SPEC. ISS., pp. 70-
79, 2004
[9] R. Z. Valiev, R. K. Islamgaliev, and I. V. Alexandrov, "Bulk
nanostructured materials from severe plastic deformation," Progress in
Materials Science, vol. 45, no. 2, pp. 103-189, 2000.
[10] Y. C. Lam, N. K. Tran, C. Y. Yue, M. J. Tan, "New deformation
phenomenon for micro-formability of polycrystalline materials,"
Materials Science and Engineering: A, vol. 528, no. 3, pp. 1906-1909,
2011.
[11] N. K. Tran, Y. C. Lam, C. Y. Yue, M. J. Tan, "Manufacturing of an
aluminum alloy mold for micro-hot embossing of polymeric microdevices,"
Journal of Micromechanics and Microengineering, vol. 20, no.
5, pp. 055020, 2010.
[12] N. K. Tran, Y. C. Lam, C. Y. Yue, M. J. Tan, "Evaluation of roughness,
hardness, and strength of AA 6061 molds for manufacturing polymeric
microdevices," International Journal of Advanced Manufacturing
Technology, pp. 1-7, 2011.
@article{"International Journal of Mechanical, Industrial and Aerospace Sciences:56722", author = "Nhat Khoa Tran and Yee Cheong Lam and Chee Yoon Yue and Ming Jen Tan", title = "Fabricating Protruded Micro-features on AA6061 Substrates by Hot Embossing Method", abstract = "Metallic micro parts are playing an important role in micro-fabrication industry. Recently, we have demonstrated a new deformation mechanism for micro-formability of polycrystalline materials. Different depressed micro-features smaller than the grain size have been successfully fabricated on 6061 aluminum alloy (AA6061) substrates with good fidelity. To further verify this proposed deformation mechanism that grain size is not a limiting factor, we demonstrate here that in addition of depressed features, protruded micro-features on a polycrystalline substrate can similarly be fabricated.
", keywords = "Deformation mechanism, grain size, microfabrication, polycrystalline materials.", volume = "6", number = "5", pages = "910-4", }
