Energy-Efficient Sensing Concept for a Micromachined Yaw Rate Sensor

The need for micromechanical inertial sensors is increasing in future electronic stability control (ESC) and other positioning, navigation and guidance systems. Due to the rising density of sensors in automotive and consumer devices the goal is not only to get high performance, robustness and smaller package sizes, but also to optimize the energy management of the overall sensor system. This paper presents an evaluation concept for a surface micromachined yaw rate sensor. Within this evaluation concept an energy-efficient operation of the drive mode of the yaw rate sensor is enabled. The presented system concept can be realized within a power management subsystem.

Authors:

• D. Oshinubi
• M. Rocznik
• K. Dostert

Keywords:

• inertial sensors
• micromachined gyros
• gyro sensing concepts
• power management
• FPGA

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