Control of the Thermal Evaporation of Organic Semiconductors via Exact Linearization

In this article, a high vacuum system for the evaporation of organic semiconductors is introduced and a mathematical model is given. Based on the exact input output linearization a deposition rate controller is designed and tested with different evaporation materials.

• Martin Steinberger
• Martin Horn

• Effusion cell
• organic semiconductors
• deposition rate
• exact linearization.

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