Abstract: A measurement system for pH array sensors is
introduced to increase accuracy, and decrease non-ideal effects
successfully. An array readout circuit reads eight potentiometric
signals at the same time, and obtains an average value. The deviation
value or the extreme value is counteracted and the output voltage is a
relatively stable value. The errors of measuring pH buffer solutions are
decreased obviously with this measurement system, and the non-ideal
effects, drift and hysteresis, are lowered to 1.638mV/hr and 1.118mV,
respectively. The efficiency and stability are better than single sensor.
The whole sensing characteristics are improved.
Abstract: This paper presents the characterization and design of a capacitive pressure sensor with LC-based 0.35 µm CMOS readout circuit. SPICE is employed to evaluate the characteristics of the readout circuit and COMSOL multiphysics structural analysis is used to simulate the behavior of the pressure sensor. The readout circuit converts the capacitance variation of the pressure sensor into the frequency output. Simulation results show that the proposed pressure sensor has output frequency from 2.50 to 2.28 GHz in a pressure range from 0.1 to 2 MPa almost linearly. The sensitivity of the frequency shift with respect to the applied pressure load is 0.11 GHz/MPa.