Abstract: The present study deals with the characterization of
CrSiN coatings obtained by PVD magnetron sputtering systems.
CrSiN films were deposited with different Si contents, in order to
check the effect of at.% variation on the different properties of the
Cr–N system. Coatings were characterized by scanning electron
microscopy (SEM) for thickness measurements, X-ray diffraction.
Surface morphology and the roughness characteristics were explored
using AFM, Mechanicals properties, elastic and plastic deformation
resistance of thin films were investigated using nanoindentation test. We observed that the Si addition improved the hardness and the
Young’s modulus of the Cr–N system. Indeed, the hardness value is
18,56 GPa for CrSiN coatings. Besides, the Young’s modulus value
is 224,22 GPa for CrSiN coatings for Si content of 1.2 at.%.