The Design, Development, and Optimization of a Capacitive Pressure Sensor Utilizing an Existing 9 DOF Platform

Nine Degrees of Freedom (9 DOF) systems are already in development in many areas. In this paper, an integrated pressure sensor is proposed that will make use of an already existing monolithic 9 DOF inertial MEMS platform. Capacitive pressure sensors can suffer from limited sensitivity for a given size of membrane. This novel pressure sensor design increases the sensitivity by over 5 times compared to a traditional array of square diaphragms while still fitting within a 2 mm x 2 mm chip and maintaining a fixed static capacitance. The improved design uses one large diaphragm supported by pillars with fixed electrodes placed above the areas of maximum deflection. The design optimization increases the sensitivity from 0.22 fF/kPa to 1.16 fF/kPa. Temperature sensitivity was also examined through simulation.

Low-Cost Inertial Sensors Modeling Using Allan Variance

Micro-electromechanical system (MEMS) accelerometers and gyroscopes are suitable for the inertial navigation system (INS) of many applications due to low price, small dimensions and light weight. The main disadvantage in a comparison with classic sensors is a worse long term stability. The estimation accuracy is mostly affected by the time-dependent growth of inertial sensor errors, especially the stochastic errors. In order to eliminate negative effects of these random errors, they must be accurately modeled. In this paper, the Allan variance technique will be used in modeling the stochastic errors of the inertial sensors. By performing a simple operation on the entire length of data, a characteristic curve is obtained whose inspection provides a systematic characterization of various random errors contained in the inertial-sensor output data.

A Study of RSCMAC Enhanced GPS Dynamic Positioning

The purpose of this research is to develop and apply the RSCMAC to enhance the dynamic accuracy of Global Positioning System (GPS). GPS devices provide services of accurate positioning, speed detection and highly precise time standard for over 98% area on the earth. The overall operation of Global Positioning System includes 24 GPS satellites in space; signal transmission that includes 2 frequency carrier waves (Link 1 and Link 2) and 2 sets random telegraphic codes (C/A code and P code), on-earth monitoring stations or client GPS receivers. Only 4 satellites utilization, the client position and its elevation can be detected rapidly. The more receivable satellites, the more accurate position can be decoded. Currently, the standard positioning accuracy of the simplified GPS receiver is greatly increased, but due to affected by the error of satellite clock, the troposphere delay and the ionosphere delay, current measurement accuracy is in the level of 5~15m. In increasing the dynamic GPS positioning accuracy, most researchers mainly use inertial navigation system (INS) and installation of other sensors or maps for the assistance. This research utilizes the RSCMAC advantages of fast learning, learning convergence assurance, solving capability of time-related dynamic system problems with the static positioning calibration structure to improve and increase the GPS dynamic accuracy. The increasing of GPS dynamic positioning accuracy can be achieved by using RSCMAC system with GPS receivers collecting dynamic error data for the error prediction and follows by using the predicted error to correct the GPS dynamic positioning data. The ultimate purpose of this research is to improve the dynamic positioning error of cheap GPS receivers and the economic benefits will be enhanced while the accuracy is increased.