Abstract: Ellipsometry is an optical method based on the study of the behavior of polarized light. The light reflected on a surface induces a change in the polarization state which depends on the characteristics of the material (complex refractive index and thickness of the different layers constituting the device). The purpose of this work is to determine the optical properties of semiconductor thin films by ellipsometry. This paper describes the experimental aspects concerning the semiconductor samples, the SE400 ellipsometer principle, and the results obtained by direct measurements of ellipsometric parameters and modelling using appropriate software.
Abstract: Hydrogenated amorphous carbon (a-C:H) films have
been synthesized by a radio frequency plasma enhanced chemical
vapor deposition (rf-PECVD) technique with different bias voltage
from 0.0 to -0.5 kV. The Raman spectra displayed the polymer-like
hydrogenated amorphous carbon (PLCH) film with 0.0 to -0.1 and
a-C:H films with -0.2 to -0.5 kV of bias voltages. The surface chemical
information of all films were studied by X-ray photoelectron
spectroscopy (XPS) technique, presented to C-C (sp2 and sp3) and C-O
bonds, and relative carbon (C) and oxygen (O) atomics contents. The
O contamination had affected on structure and optical properties. The
true density of PLCH and a-C:H films were characterized by X-ray
refractivity (XRR) method, showed the result as in the range of
1.16-1.73 g/cm3 that depending on an increasing of bias voltage. The
hardness was proportional to the true density of films. In addition, the
optical properties i.e. refractive index (n) and extinction coefficient (k)
of these films were determined by a spectroscopic ellipsometry (SE)
method that give formation to in 1.62-2.10 (n) and 0.04-0.15 (k)
respectively. These results indicated that the optical properties
confirmed the Raman results as presenting the structure changed with
applied bias voltage increased.
Abstract: The adsorption of bovine serum albumin (BSA), immunoglobulin G (IgG) and fibrinogen (Fgn) on fluorinated selfassembled monolayers have been studied using time of flight secondary ion mass spectrometry (ToF-SIMS) and Spectroscopic Ellipsometry (SE). The objective of the work has to establish the utility of ToF-SIMS for the determination of the amount of protein adsorbed on the surface. Quantification of surface adsorbed proteins was carried out using SE and a good correlation between ToF-SIMS results and SE was achieved. The surface distribution of proteins were also analysed using Atomic Force Microscopy (AFM). We show that the surface distribution of proteins strongly affect the ToFSIMS results.
Abstract: The porous silicon (PS), formed from the anodization
of a p+ type substrate silicon, consists of a network organized in a
pseudo-column as structure of multiple side ramifications. Structural
micro-topology can be interpreted as the fraction of the interconnected
solid phase contributing to thermal transport. The
reduction of dimensions of silicon of each nanocristallite during the
oxidation induced a reduction in thermal conductivity. Integration of
thermal sensors in the Microsystems silicon requires an effective
insulation of the sensor element. Indeed, the low thermal conductivity
of PS consists in a very promising way in the fabrication of integrated
thermal Microsystems.In this work we are interesting in the
measurements of thermal conductivity (on the surface and in depth)
of PS by the micro-Raman spectroscopy. The thermal conductivity is
studied according to the parameters of anodization (initial doping and
current density. We also, determine porosity of samples by
spectroellipsometry.