Abstract: Pull-in instability is a nonlinear and crucial effect that is important for the design of microelectromechanical system devices. In this paper, the appropriate electrostatic voltage range is determined by measuring fluid flow pressure via micro pressure sensor based microbeam. The microbeam deflection contains two parts, the static and perturbation deflection of static. The second order equation regarding the equivalent stiffness, mass and damping matrices based on Galerkin method is introduced to predict pull-in instability due to the external voltage. Also the reduced order method is used for solving the second order nonlinear equation of motion. Furthermore, in the present study, the micro capacitive pressure sensor is designed for measuring special fluid flow pressure range. The results show that the measurable pressure range can be optimized, regarding damping field and external voltage.
Abstract: Differing from the structure of traditional parallel plate capacitive sensor a semi cylindrical capacitive sensor has been introduced in this present work to measure the soil moisture conveniently. Here, the numerical analysis method to evaluate the capacitance from the semi-cylindrical capacitive sensor is analyzed and discussed. The changes of capacitance with the variation of soil moisture obtained linear in the nano farad range (nF) and which converted into voltage variation by using proper signal conditioning circuit. Experimental results depict the satisfactory performance of the sensor for measurement of soil moisture in the range of 0 to 70%. We investigated the linearity of 4% of FSO and sensitivity of 70 mV/unit percentage changes in soil moisture level (DB).
Abstract: Force sensor has been used as requisite for knowing information on the amount and the directions of forces on the skin surface. We have developed a four-degrees-of-freedom capacitive force sensor (approximately 20×20×5 mm3) that has a flexible structure and sixteen parallel plate capacitors. An iterative algorithm was developed for estimating four displacements from the sixteen capacitances using fourth-order polynomial approximation of characteristics between capacitance and displacement. The estimation results from measured capacitances had large error caused by deterioration of the characteristics. In this study, effective capacitors had major information were selected on the basis of the capacitance change range and the characteristic shape. Maximum errors in calibration and non-calibration points were 25%and 6.8%.However the maximum error was larger than desired value, the smallness of averaged value indicated the occurrence of a few large error points. On the other hand, error in non-calibration point was within desired value.
Abstract: This paper describes a low-power second-order filter
for a continuous-time chopper stabilized capacitive sensor interface,
integrated with a fully differential post-CMOS surface-micromachined
MEMS pressure sensor. The circuit uses a single-ended
folded-cascode operational amplifier and two GM-C filters connected
in cascade. The circuit is realized in a 0.18 μm CMOS process and
offers differential to single-ended conversion. The novelty of the
scheme is the cascade of two GM-C filters to achieve a second-order
filter while minimizing power dissipation. The simulated filter cutoff
frequency is 1.14 kHz at common-mode voltage 1.65 V,
operating from a 3.3 V supply while dissipating 172μW of power.
The filter achieves an operating range of 1V for an output load of
1MOhm and 10pF.
Abstract: A new interface circuit for capacitive sensor is
presented. This paper presents the design and simulation of soil
moisture capacitive sensor interface circuit based on phase
differential technique. The circuit has been designed and fabricated
using MIMOS- 0.35"m CMOS technology. Simulation and test
results show linear characteristic from 36 – 52 degree phase
difference, representing 0 – 100% in soil moisture level. Test result
shows the circuit has sensitivity of 0.79mV/0.10 phase difference,
translating into resolution of 10% soil moisture level.
Abstract: Capacitive electrocardiogram (ECG) measurement is an attractive approach for long-term health monitoring. However, there is little literature available on its implementation, especially for multichannel system in standard ECG leads. This paper begins from the design criteria for capacitive ECG measurement and presents a multichannel limb-lead capacitive ECG system with conductive fabric tapes pasted on a double layer PCB as the capacitive sensors. The proposed prototype system incorporates a capacitive driven-body (CDB) circuit to reduce the common-mode power-line interference (PLI). The presented prototype system has been verified to be stable by theoretic analysis and practical long-term experiments. The signal quality is competitive to that acquired by commercial ECG machines. The feasible size and distance of capacitive sensor have also been evaluated by a series of tests. From the test results, it is suggested to be greater than 60 cm2 in sensor size and be smaller than 1.5 mm in distance for capacitive ECG measurement.
Abstract: Moisture is an important consideration in many
aspects ranging from irrigation, soil chemistry, golf course, corrosion
and erosion, road conditions, weather predictions, livestock feed
moisture levels, water seepage etc. Vegetation and crops always
depend more on the moisture available at the root level than on
precipitation occurrence. In this paper, design of an instrument is
discussed which tells about the variation in the moisture contents of
soil. This is done by measuring the amount of water content in soil by
finding the variation in capacitance of soil with the help of a
capacitive sensor. The greatest advantage of soil moisture sensor is
reduced water consumption. The sensor is also be used to set lower
and upper threshold to maintain optimum soil moisture saturation and
minimize water wilting, contributes to deeper plant root growth
,reduced soil run off /leaching and less favorable condition for insects
and fungal diseases. Capacitance method is preferred because, it
provides absolute amount of water content and also measures water
content at any depth.
Abstract: Rotating stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor state of manufactured goods. To evaluate and improve the performance of such precision rotary stage, unessential movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of a rotating stage with high precision capacitive sensors. To obtain the radial error motion from T.I.R (Total Indicated Reading) of radial direction, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have defined and measured the sensitivity of positioning error to the five error motions.