Mechanical Properties and Microstructural Properties of CrSiN Coating
The present study deals with the characterization of
CrSiN coatings obtained by PVD magnetron sputtering systems.
CrSiN films were deposited with different Si contents, in order to
check the effect of at.% variation on the different properties of the
Cr–N system. Coatings were characterized by scanning electron
microscopy (SEM) for thickness measurements, X-ray diffraction.
Surface morphology and the roughness characteristics were explored
using AFM, Mechanicals properties, elastic and plastic deformation
resistance of thin films were investigated using nanoindentation test. We observed that the Si addition improved the hardness and the
Young’s modulus of the Cr–N system. Indeed, the hardness value is
18,56 GPa for CrSiN coatings. Besides, the Young’s modulus value
is 224,22 GPa for CrSiN coatings for Si content of 1.2 at.%.
[1] G. Bertrand, C. Savall, C. Meunier, “Properties of reactively RF
magnetron-sputtered chromium nitride coatings,” Surface and Coatings
Technology vol. 96, 1997, pp. 323-329.
[2] D. Lee, Y. Lee, S. Kwon “High temperature oxidation of a CrN coating
deposited on a steel substrate by ion plating,” in Surface and Coatings
Technology vol. 141, 2001, pp. 227-231.
[3] Z. Han, J. Tian, Q. Lai, X. Yu, G. Li, “Effect of N2 partial pressure on
the microstructure and mechanical properties of magnetron sputtered
CrNx,” in in Surface and Coatings Technology, vol. 162, 2003, pp. 189-
193. [4] Holger Hoche, Stefan Groß, Matthias Oechsn, “Development of new
PVD coatings for magnesium alloys with improved corrosion
properties,” in Surf. Coat. Technol, vol. 259, 2014, pp 102-108.
[5] D.S. Belov, I.V. Blinkov, A.O. Volkhonskii, “The effect of Cu and Ni
on the nanostructure and properties of arc-PVD coatings based on
titanium nitride,” in Surf. Coat. Technol, vol. 260, 2014, pp 186-197.
[6] A. Kimura, M. Kawate, H. Hasegawa, T. Suzuki, “Anisotropic lattice
expansion and shrinkage of hexagonal TiAlN and CrAlN films,” Surf.
Coat. Technol, vol. 367, 2003, pp 169-170.
[7] Lee S-Y, Hong Y-S, “Effect of CrSiN thin film coating on the
improvement of the low-speed torque efficiency of a hydraulic piston
pump,” in Surf. Coat. Technol, vol. 202, 2007, pp 1129-1134.
[8] Yoo YH, Hong JH, Kim JG, Lee HY, Han JG, “Effect of Si addition to
CrN coatings on the corrosion resistance of CrN/stainless steel
coating/substrate system in a deaerated 3.5 wt.% NaCl solution,” in Surf.
Coat. Technol, vol. 201, 2007, pp 9518-9523.
[9] Barshilia HC, Selvakumar N, Deepthi B, Rajam KS, “A comparative
study of reactive direct current magnetron sputtered CrAlN and CrN
coatings,” in Surf. Coat. Technol. vol. 201, 2006, pp 2193.
[10] Ding XZ, Zeng XT, “Structural, mechanical and tribological properties
of CrAlN coatings deposited by reactive unbalanced magnetron
sputtering,” in Surface & Coatings Technology, vol. 200, 2005, pp
1372–1376.
[11] Benkahoul M, Robin P, Gujrathi SC, Martinu L, Klemberg-Sapieha JE,
“Microstructure and mechanical properties of Cr–Si–N coatings
prepared by pulsed reactive dual magnetron sputtering.,” in Surf. Coat.
Technol. vol. 202, 2008, pp 3975-3980.
[12] Lee J-W, Chang Y-C, “A study on the microstructures and mechanical
properties of pulsed DC-reactive magnetron sputtered Cr–Si–N
nanocomposite coatings,” in Surface & Coatings Technology, vol. 202,
2007, pp 831–835.
[13] Hetal N. Shaha, B. R. Jayaganthana, Davinder Kaurc, “Influence of
reactive gas and temperature on structural properties of magnetron
sputtered CrSiN coatings,” in Applied Surface Science, vol. 257, 2011,
pp 5535–5543.
[14] Zenghu H, Jiawan T, Jijun L, Geyang L, Jiawei D, “Effects of thickness
and substrate on the mechanical properties of hard coatings,” in J. Coat.
Technol. Res, vol. 1, 2004, pp 337–341.
[15] Y.H. Yoo, J.H. Hong, J.G. Kim, H.Y. Lee, J.G. Han, “Effect of Si
addition to CrN coatings on the corrosion resistance of CrN/stainless
steel coating/substrate system in a deaerated 3.5 wt.% NaCl solution,” in
Surface and Technology, vol. 201, 2007, pp 9518–9523.
[16] Hetal N. Shaha,b, R. Jayaganthana,, Davinder Kaurc, “Influence of
reactive gas and temperature on structural properties of magnetron
sputtered CrSiN coatings,” in Applied Surface Science, vol. 257, 2011,
pp 5535–5543.
[17] W. C. Oliver and G. M. Pharr, “An improved technique for determining
hardness and elastic modulus using load and displacement sensing
indentation experiments,” in J. Mater. Res., vol. 6, 1992, pp 1564–1583.
[1] G. Bertrand, C. Savall, C. Meunier, “Properties of reactively RF
magnetron-sputtered chromium nitride coatings,” Surface and Coatings
Technology vol. 96, 1997, pp. 323-329.
[2] D. Lee, Y. Lee, S. Kwon “High temperature oxidation of a CrN coating
deposited on a steel substrate by ion plating,” in Surface and Coatings
Technology vol. 141, 2001, pp. 227-231.
[3] Z. Han, J. Tian, Q. Lai, X. Yu, G. Li, “Effect of N2 partial pressure on
the microstructure and mechanical properties of magnetron sputtered
CrNx,” in in Surface and Coatings Technology, vol. 162, 2003, pp. 189-
193. [4] Holger Hoche, Stefan Groß, Matthias Oechsn, “Development of new
PVD coatings for magnesium alloys with improved corrosion
properties,” in Surf. Coat. Technol, vol. 259, 2014, pp 102-108.
[5] D.S. Belov, I.V. Blinkov, A.O. Volkhonskii, “The effect of Cu and Ni
on the nanostructure and properties of arc-PVD coatings based on
titanium nitride,” in Surf. Coat. Technol, vol. 260, 2014, pp 186-197.
[6] A. Kimura, M. Kawate, H. Hasegawa, T. Suzuki, “Anisotropic lattice
expansion and shrinkage of hexagonal TiAlN and CrAlN films,” Surf.
Coat. Technol, vol. 367, 2003, pp 169-170.
[7] Lee S-Y, Hong Y-S, “Effect of CrSiN thin film coating on the
improvement of the low-speed torque efficiency of a hydraulic piston
pump,” in Surf. Coat. Technol, vol. 202, 2007, pp 1129-1134.
[8] Yoo YH, Hong JH, Kim JG, Lee HY, Han JG, “Effect of Si addition to
CrN coatings on the corrosion resistance of CrN/stainless steel
coating/substrate system in a deaerated 3.5 wt.% NaCl solution,” in Surf.
Coat. Technol, vol. 201, 2007, pp 9518-9523.
[9] Barshilia HC, Selvakumar N, Deepthi B, Rajam KS, “A comparative
study of reactive direct current magnetron sputtered CrAlN and CrN
coatings,” in Surf. Coat. Technol. vol. 201, 2006, pp 2193.
[10] Ding XZ, Zeng XT, “Structural, mechanical and tribological properties
of CrAlN coatings deposited by reactive unbalanced magnetron
sputtering,” in Surface & Coatings Technology, vol. 200, 2005, pp
1372–1376.
[11] Benkahoul M, Robin P, Gujrathi SC, Martinu L, Klemberg-Sapieha JE,
“Microstructure and mechanical properties of Cr–Si–N coatings
prepared by pulsed reactive dual magnetron sputtering.,” in Surf. Coat.
Technol. vol. 202, 2008, pp 3975-3980.
[12] Lee J-W, Chang Y-C, “A study on the microstructures and mechanical
properties of pulsed DC-reactive magnetron sputtered Cr–Si–N
nanocomposite coatings,” in Surface & Coatings Technology, vol. 202,
2007, pp 831–835.
[13] Hetal N. Shaha, B. R. Jayaganthana, Davinder Kaurc, “Influence of
reactive gas and temperature on structural properties of magnetron
sputtered CrSiN coatings,” in Applied Surface Science, vol. 257, 2011,
pp 5535–5543.
[14] Zenghu H, Jiawan T, Jijun L, Geyang L, Jiawei D, “Effects of thickness
and substrate on the mechanical properties of hard coatings,” in J. Coat.
Technol. Res, vol. 1, 2004, pp 337–341.
[15] Y.H. Yoo, J.H. Hong, J.G. Kim, H.Y. Lee, J.G. Han, “Effect of Si
addition to CrN coatings on the corrosion resistance of CrN/stainless
steel coating/substrate system in a deaerated 3.5 wt.% NaCl solution,” in
Surface and Technology, vol. 201, 2007, pp 9518–9523.
[16] Hetal N. Shaha,b, R. Jayaganthana,, Davinder Kaurc, “Influence of
reactive gas and temperature on structural properties of magnetron
sputtered CrSiN coatings,” in Applied Surface Science, vol. 257, 2011,
pp 5535–5543.
[17] W. C. Oliver and G. M. Pharr, “An improved technique for determining
hardness and elastic modulus using load and displacement sensing
indentation experiments,” in J. Mater. Res., vol. 6, 1992, pp 1564–1583.
@article{"International Journal of Chemical, Materials and Biomolecular Sciences:71220", author = "Dhiflaoui Hafedh and Khlifi Kaouthar and Ben Cheikh Larbi Ahmed", title = "Mechanical Properties and Microstructural Properties of CrSiN Coating", abstract = "The present study deals with the characterization of
CrSiN coatings obtained by PVD magnetron sputtering systems.
CrSiN films were deposited with different Si contents, in order to
check the effect of at.% variation on the different properties of the
Cr–N system. Coatings were characterized by scanning electron
microscopy (SEM) for thickness measurements, X-ray diffraction.
Surface morphology and the roughness characteristics were explored
using AFM, Mechanicals properties, elastic and plastic deformation
resistance of thin films were investigated using nanoindentation test. We observed that the Si addition improved the hardness and the
Young’s modulus of the Cr–N system. Indeed, the hardness value is
18,56 GPa for CrSiN coatings. Besides, the Young’s modulus value
is 224,22 GPa for CrSiN coatings for Si content of 1.2 at.%.", keywords = "Thin film, mechanicals properties, PVD.", volume = "9", number = "8", pages = "1056-5", }
